Our professional arc management solutions

High deposition rates and outstanding coating qualities are among the key quality requirements for plasma-supported coating processes, the main applications of which are solar cell manufacturing and the coating of flat panel displays and architectural glass. The deposition of thin coats in the plasma chamber can, however, be severely disturbed by electrical arcs. Because of that the power supply must be able to detect occurring arcs immediately and react to them precisely.

We offer matching arc management systems that meet the requirements of a variety of processes. This enables the generator to respond to the arc quickly and precisely. The innovative sensors improve processing results and increase productivity. We offer improved output at the same price without the need to purchase additional hardware.

High power density and deposition rates are a major factor in the coating of architectural glass. The optimal generator for this is the TruPlasma MF Series 7000 (50 kHz). These process power supplies are equipped by default with the innovative arc management system SensorLine. SensorLine ensures that plasma is interrupted in the event of arcing. SensorLine's unique feature: the time between the appearance of an arc and the return to normal operation is less than a millisecond, which keeps processes efficient and stable.

If extremely thin and homogenous coats are required, as in the manufacture of flat panel displays, the TruPlasma MF Series 7000 (70 kHz) is the perfect solution. For optimum operation of these very demanding processes, HÜTTINGER offers DetectLine, an arc management system for these power supplies. DetectLine responds very sensitively to occurring arcs, thus guaranteeing outstanding coating qualities.

Power supplies from the TruPlasma DC Series 3000 are specially suited for DC sputtering processes. Equipped with the innovative arc management system Compensate Line, the generators have proven themselves particularly well in processes where reliability and performance are of central importance, for example, in solar cell manufacturing. If arcing occurs, CompensateLine optimally balances the stored energy in the output circuit as well as in the connection cable between the generator and the cathode. This results in a very fast generator response time in the process power supply to the arc and keeps residual energy to a minimum. This is how CompensateLine ensures, even in arc-rich processes like TCO sputtering, outstanding coating qualities.