Master Oscillator

The manager for frequency synchronous operation

Masteroscillator

Critical synchronous plasma processes can be stabilized and optimized with the HÜTTINGER master oscillators. The integrated digital frequency and phase synthesizer ensures:

radio frequency and phase stability
setting the phase lag in the smallest steps
high temperature and long term stability

HÜTTINGER master oscillators can also synchronize frequencies of 13.56 MHz and 3.39 MHz at the same time.

Product Overview

Master Oscillator
Product	Channels	Frequency [kHz]	Weight [kg]	Dimensions [mm]
MOP 2/13	2	13.56	1.5	483 x 90 x 350
MOP 4/13	4	13.56	1.5	483 x 90 x 350
MOP 8/13	8	13.56	1.5	483 x 90 x 350
MOP 16/13	16	13.56	1.5	483 x 90 x 350
MOP 2/13/3.3	1/1	13.56/3.39	1.5	483 x 90 x 350
MOP 4/13/3.3	2/2	13.56/3.39	1.5	483 x 90 x 350

All masteroscillator have the following characteristics:

Frequency 13,56 MHz +/- 0,005% / (3,39 MHz +/- 0,005%)

Phase adjustment: 0 - 360°

Step width 0.1°

Phase stability +/- 1°; (T=10°C - 35°C)

Output impedance 50 Ohm; BNC

Output signal:

TTL version rectangle signal, TTL level

Sinus version sinusoidal signal; level 0,3 up to 90 mW

TTL/Sinus version on request

Control:

Manually via control panel with LCD display

Remote via RS 232, Profibus or A/D port

Mains 85 V - 264 V N/PE; 50/60 Hz / 100 VA

Masteroscillators / MOP

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