PFS RF-Switch

Multiple process chambers and one power supply

RF-Switch
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A RF toggle switch permits multiple use of a RF generator in flexible plasma systems:

  • in sequential processes
  • in systems with different supply entry points

The toggle switches are optimally designed for the requirements of such systems:

  • only the selected outlet is activated
  • non-activated outlets are grounded to the mass
  • switching occurs in the un-powered condition
  • secure switching off thanks to a delay function
Applications
Product Overview

RF commutators permit supply of high frequency power to different process stations of an installation by a RF generator

We offer the RF commutators in two power classes with 2,3 or 4 outlets.

With an additional control device PFS 100 A, the RF commutator can be optimally controlled by the operating unit of a HÜTTINGER RF generator of the PFG RF Series and the QINTO family.

Applications
Product Overview
PFS RF-Switch
Product Nominal Power
[W]		 Load Current max.
[A eff]		 Input and Outputs
 Frequency
[MHz]		 Load voltage
[kV]		 Dimensions
[mm]		 Weight
[kg]
PFS 1500 A 1500 6 50 Ω koaxial Typ N (Buchse) 13.56 max. 2 240 x 141 x 86 1.5
PFS 3000 A 3000 8.5 50 Ω koaxial 7/16 (Buchse) 13.56 max. 2 240 x 141 x 86 1.5
 
 

RF Switch / PFS

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