Bipolar pulsed power for dual magnetron processes.
| Features | Benefits | |
|---|---|---|
| 8 operating modes from pure DC to full bipolar pulsing; versatile rectangular output voltage waveform | Optimum adjustment to a large variety of processes | |
| Independent settings for positive and negative pulse duty cycles | Controllable power delivery for maximum target utilization in dual magnetron applications | |
| Precise arc control over entire pulse width | Lowest arc energy for best sputter results | |
| Adjustable frequency and variable pulse parameters | Optimal process conditions and user friendly operation | |
| Enhanced ignition characteristics | Covers a wide application range with only one power supply | |
| Mains 400 V 3-phase | ||
| Rear connection with various communication interfaces | Optimum tool integration | |
The TruPlasma Bipolar product family is a versatile series of bipolar pulsed power supplies for up to 2 x 50 kHz pulsing frequency. Its highly adjustable pulsing characteristics make the TruPlasma Bipolar Series 4000 an excellent alternative to sinusoidal mid-frequency power supplies.
Offering a power range from 5 kW to 30 kW, the TruPlasma Bipolar Series 4000 can serve dual magnetron applications in small and alrge-scale. Optimum target utilisation is possible by the separate adjustment of power levels for the positive and negative half cycle. The advanced arc control enables defect-free film deposition results for all kinds of target materials.
With these features, the TruPlasma Bipolar Series is an ideal solution for many applications in architectural glass, film and fabric coating. Also target material deposition in flat panel display manufacturing and hard / decorative coating can be served.
