DC Generators TruPlasma DC Series 4000

Perfection in sight

The versions and their vantages:

  • for pulsed DC-uses
  • cutting-edge arc management technology
  • synchronous pulsing
Features Benefits
Low Arc Energy   Limited droplets and substrate damage rates
Short after-arc break and recovery time   Increased production yield
Fast DSP Control   Stable plasma and low arc-related time losses
Synchronous Pulsing   Easy process optimization and user friendly operation
Wide range of adjustable parameters: frequency and pulseparameters   Allows for a wide range of applications with one device

The DC generator product series 4000 are a perfect fit for sophisticated plasma processes. Thus they qualify for high-tech sputtering applications and other DC or pulsed DC plasma applications. The integrated, superior arc management ensures maximum production yields and very homogeneous film quality.

DC Generators TruPlasma DC Series 4000
Product Power
[kW]
Output voltage
[V]
Output current
[A]
Cooling
Mains voltage
[V]
TruPlasma DC 4005 5* 800 12.5 Air (±10%) 400
TruPlasma DC 4010 10* 800 25 Air (±10%) 400
TruPlasma DC 4020 20* 800 50 Air (±10%) 400
TruPlasma DC 4030 30* 800 75 Air (±10%) 400

* Powers over 120 kW available upon request.

TruPlasma DC Series 4000