The versions and their vantages:
- for pulsed DC-uses
- cutting-edge arc management technology
- synchronous pulsing
The versions and their vantages:
| Features | Benefits | |
|---|---|---|
| Low Arc Energy | Limited droplets and substrate damage rates | |
| Short after-arc break and recovery time | Increased production yield | |
| Fast DSP Control | Stable plasma and low arc-related time losses | |
| Synchronous Pulsing | Easy process optimization and user friendly operation | |
| Wide range of adjustable parameters: frequency and pulseparameters | Allows for a wide range of applications with one device | |
The DC generator product series 4000 are a perfect fit for sophisticated plasma processes. Thus they qualify for high-tech sputtering applications and other DC or pulsed DC plasma applications. The integrated, superior arc management ensures maximum production yields and very homogeneous film quality.
* Powers over 120 kW available upon request.