The TruPlasma MF Series 3000 compacted power at the smallest room:
- for small and middle power
- her units cover output ranges of 10 kW to 40 kW
- these systems, with their dual magnetrons, have a proven sputtering track record
MF Generators TruPlasma MF Series 3000
Reaching new levels in plasma excitation
| Features | Benefits | |
|---|---|---|
| Fast arc management system and sinusiodal wave form | High deposition rates for even the most demanding processes | |
| Wide output power range | Adapts to many different process requirements | |
| Proven, high quality technology | High reliability maintains system uptime and productivity | |
The TruPlasma MF Series 3000 family of products encompasses a range of medium-frequency generators for plasma excitation in a modular design. Her units cover output ranges of 10 kW to 40 kW, at frequencies from 20 kHz to 100 kHz. These systems, with their dual magnetrons, have a proven sputtering track record.
Output voltages dependent on mains voltage:
200 V mains voltage: 900 V - 1 700 V;
400 V mains voltage: 1 100 V - 2 050 V;
200 V main voltage: 2 150 V - 4 200 V available for TruPlasma MF 3010 / 3020 at 15 A maximum output current
