RF Generators

Macro Results for Micro Processes

Overvie of RF-Generators
Our high-frequency plasma generators

RF generators, with their very high output stability, are used in manufacturing the tiniest of devices, such as semiconductors and micro components. Many critical processes can only be successfully performed with RF solutions.

TruPlasma RF Series 7000

TruPlasma RF 7020
High reliable RF power supplies for plasma excitation with high quality.
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TruPlasma RF Serie 1000

TruPlasma RF 1003
Designed for RF plasma processes in semicon- ductor manufacturing.
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