The TruPlasma RF Series 1000 incorporates the advantages of HÜTTINGER´s unique power coupling technology CombineLine and an optimised power converter for maximum productivity of RF plasma processes.
| Features | Benefits | |
|---|---|---|
| Best in class efficiency factor of 80 percent | Reduces operational cost | |
| Particularly robust power supply | Maximum system uptime, even in critical processes | |
| True 50 Ohm output impedance | Stable processes for best productivity | |
| Accurate control at low power levels | High reproducibility of process results | |
| Choice of cable length between generator and matchbox | Easy and cost-efficient integration in film deposition tools | |
The TruPlasma RF Series 1000 is designed with focus on RF plasma processes in semiconductor manufacturing. Typical processes include PECVD and PVD as well as dry etching. Its features are also well-suited to ensure best results and productivity in solar cell production and surface treatment processes.
HÜTTINGER´s proprietary combiner technology, CombineLine, guarantees uninterrupted power delivery, even in processes with strong plasma fluctuations. Additionally, the TruPlasma RF Series 1000 provides an exceptional energy conversion efficiency factor of more than 80 percent - for film deposition processes at best productivity and cost optimization.
