RF Generators TruPlasma RF Series 7000

High resolution needs high power

Our RF series - best process results.

  • This series, with its optimized technology, has proven popular since a large number of units are in use.
  • Matchboxes are available for these systems which are matched to the respective use and power rating.
  • Power outputs ranging from 10 kW to 50 kW.
Features Benefits
Robust architecture utilizing best-of-class design (tube / solid state hybrid)   Superior reliability in high productivity processes
Proven technology with 100 percent mismatch protection   Assured performance under critical load conditions
Multiple control interfaces   Easily integrates to host system
CW or pulse mode   Supports a wide variety of process requirements
Proactive RF arc management   Prevents electrode damages and stabilizes plasmas
Built-in matchbox remote control   All-in-one solution for reduced total cost of ownership

The TruPlasma MF series 7000 includes high-quality RF generators for plasma excitation. TruPlasma MF series products are available with power outputs ranging from 10 kW to 50 kW, at a frequency of 13.56 MHz. Matchboxes are available for these systems which are matched to the respective use and power rating.

Power [kW]
Frequency [kHz]
RF Generators TruPlasma RF Series 7000
Product Power
[kW]
Frequency
[kHz]
Cooling
Mains voltage
[V]
TruPlasma RF 7010 10 3390 Water (±10%) 400
TruPlasma RF 7010 10 13560 Water (±10%) 400
TruPlasma RF 7015 15 13560 Water (±10%) 400
TruPlasma RF 7018 18 3390 Water (±10%) 440
TruPlasma RF 7020 20 13560 Water (±10%) 400
TruPlasma RF 7030 30 13560 Water (±10%) 440
TruPlasma RF 7040 40 13560 Water (±10%) 440
TruPlasma RF 7050 50 13560 Water (±10%) 440

Options:

Alternative mains for many countries:

TruPlasma RF 7007 - 7020 (13,56 MHz) mit 200 V, 208 V, 440 V, 480 V

TruPlasma RF 7030 - 7050 (13,56 MHz) mit 400 V, 480 V

TruPlasma RF 7010 - 7018 (3,39 MHz) mit 400 V, 480 V

TruPlasma RF Series 7000