Our HF series - best sputter results.
| Features | Benefits | |
|---|---|---|
| Robust architecture utilizing best-of-class design (tube / solid state hybrid) | Superior reliability in high productivity processes | |
| Proven technology with 100 % mismatch protection | Assured performance under critical load conditions | |
| Multiple control interfaces | Easily integrates to host system | |
| CW or pulse mode | Supports a wide variety of process requirements | |
| Proactive RF arc management | Prevents electrode damages and stabilizes plasmas | |
| Built-in matchbox remote control | All-in-one solution for reduced total cost of ownership | |
The TruPlasma MF series 7000 includes high-quality RF generators for plasma excitation. TruPlasma MF series products are available with power outputs ranging from 10 kW to 50 kW, at a frequency of 13.56 MHz. Matchboxes are available for these systems which are matched to the respective use and power rating.
a) Dual frequency outfit for 13.56 MHz generators
b) Alternative mains for many countries:
200 V / 208 V, 440 V or 480 V for TruPlasma RF 7007 - TruPlasma RF 7020 (13560 Mhz)
400 V or 480 V for TruPlasma RF 7030 - TruPlasma 7050 (13560), TruPlasma RF 7010 - TruPlasma RF 7030 (3390)
c) ARC-Management
